The SEM with pre-centered W filament can be operated at different accelerating voltage up to 30KV. A whole area up to 5 inches size specimen can be observed by using R (rotation) movement and t

he resolution can reach 4.5nm (SEI: 30KV, WD=8mm). The SEM provides high quality image information on surface morphology by secondary electron imaging (SEI) to 200,000X and chemical phase distribution by back-scattered electron imaging (BEI) to 200,000X. It is equipped with Voyager X-ray Quantitative Microanalysis System with Digital Imaging (Manufactured by Noran Instruments, Inc.), which can provide the information of near-surface elemental analysis, X-ray maps and line scans. Elements detected are from carbon to heavier elements in Periodic Table.