The Ion Milling System is for the TEM sample preparation. It is equipped with two ionic milling guns, which generate inert (Ar) ionic or atomic beams under high voltage (4-6KV usually) to thin

the specimens (3mm in diameter) from both sides until perforation. The tilt angle of the guns varies from O° to 90°. The sample stage is water cooled during the milling procedure. The Ion Milling System is also equipped with automatic terminator, which switches off the power to the high voltage power supply unit when a pre-set signal level through the sample being thinned, or when a certain pre-set period for milling goes up. It is very controllable to obtain high quality TEM samples. It is recommended that the central thickness of the sample is better lower than \b 401im. \b0 The TEM samples will be done for several hours and longer depends on the materials type and thickness.