State-of-the-art Imaging Time of Flight Secondary Ion Mass Spectroscopy (T0F-SIMS) with heatable/cool-able sample probe and 2 micron lateral spatial resolution. For the ToF-SIMS measurements the primary ion beam is generated with a Cesium Liquid Metal ion gun. The ion gun is capable of producing an 8 KeV beam that can be pulsed at under one nanosecond and focused to 2 mm. Secondary ion fragments are mass separated with a reflectron type time-of-flight tube. The instrument is used to take surface mass spectra with a analysis depth of approximately 1 nm. Negative and Positive ions can be analyzed in the surveys, with chemical imaging and depth profiling modes with a usable mass range to 10,000 m/z. A mass resolution of 11,000 M/DM at 29m/z is attainable for selected samples. Mass spectral data analysis is performed on a Sun Sparc 10 station or offline on a compatible PC. A heatable (+200°C) and cool-able (-200°C) sample probe provides a full range of analysis temperatures. The ToF-SIMS can provide the user with basic mass spectral data which can be interpreted for chemical information about constituents in the ppm or ppb range. Surface concentration can be calculated for some samples with sufficient preliminary studies. The ion gun can be used to sputter samples for depth information. Chemical mapping can used to analyze areas of 100 µm to 200 µm for both atomic and molecular ions.